Resilience of van der Waals metal oxyhalide hard masks for substrate-agnostic nanofabrication

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Kim S J, Kang J H. 2026. Resilience of van der Waals metal oxyhalide hard masks for substrate-agnostic nanofabrication. Int. J. Extrem. Manuf. 8 061503.. DOI: 10.1088/2631-7990/ae936b
Kim S J, Kang J H. 2026. Resilience of van der Waals metal oxyhalide hard masks for substrate-agnostic nanofabrication. Int. J. Extrem. Manuf. 8 061503.. DOI: 10.1088/2631-7990/ae936b
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