Frontiers in atomic-level manufacturing: atomic-scale friction

As micro/nanoelectromechanical systems (MEMS/NEMS) advance toward higher integration, device fabrication is entering the era of atomic and close-to-atomic scale manufacturing (ACSM). Interface friction has emerged as a critical factor affecting device performance and reliability. Atomic-scale friction is jointly determined by the atomic structure, surface chemistry, and quantum effects, exhibiting behavior markedly different from macroscopic friction. This paper reviews recent advances in atomic-scale friction research, systematically summarizing major friction models and the influence of interatomic interactions, van der Waals forces, interfacial charge transfer, and energy dissipation mechanisms (phonon friction and electronic friction) on friction behavior. It also summarizes the primary physical mechanisms enabling ultra-low friction in two-dimensional (2D) materials, carbon materials, and semiconductor materials while introducing relevant experimental methods, simulation techniques, and the application of artificial intelligence (AI) in friction research. This paper aims to provide a clear framework for understanding and controlling friction mechanisms at the atomic scale, offering theoretical and methodological references for designing highly reliable micro/nano devices and novel quantum devices.