Metalens-based 3D nanolithography breaks the throughput barrier

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Xuhao Fan, Shih-Chi Chen, Wei Xiong. Metalens-based 3D nanolithography breaks the throughput barrierJ. International Journal of Extreme Manufacturing, 2026, 8(4): 041506. DOI: 10.1088/2631-7990/ae614a
Xuhao Fan, Shih-Chi Chen, Wei Xiong. Metalens-based 3D nanolithography breaks the throughput barrierJ. International Journal of Extreme Manufacturing, 2026, 8(4): 041506. DOI: 10.1088/2631-7990/ae614a
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