Chen J, Wu J N and Yan S Z 2015 Switchable wettability of the honeybee’s tongue surface regulated by erectable glossal hairs J. Insect Sci. 15164 |
Teyssier J, Saenko S V, van der Marel D and Milinkovitch M C 2015 Photonic crystals cause active colour change in chameleons Nat. Commun. 66368 |
Reyssat E and Mahadevan L 2009 Hygromorphs: from pine cones to biomimetic bilayers J. R. Soc. Interface 6951–7 |
Armon S, Efrati E, Kupferman R and Sharon E 2011 Geometry and mechanics in the opening of chiral seed pods Science 3331726–30 |
Elbaum R, Zaltzman L, Burgert I and Fratzl P 2007 The role of wheat awns in the seed dispersal unit Science 316884–6 |
Volkov A G, Foster J C, Baker K D and Markin V S 2010 Mechanical and electrical anisotropy in Mimosa pudica pulvini Plant Signal. Behav. 51211–21 |
Vandenbrink J P, Brown E A, Harmer S L and Blackman B K 2014 Turning heads: the biology of solar tracking in sunflower Plant Sci. 22420–26 |
Li S, Zeng Y, Hou W, Wan W, Zhang J N, Wang Y L, Du X and Gu Z Z 2020 Photo-responsive photonic hydrogel: in situ manipulation and monitoring of cell scaffold stiffness Mater. Horiz. 72944–50 |
Gelmi A and Schutt C E 2021 Stimuli-responsive biomaterials: scaffolds for stem cell control Adv. Healthcare Mater. 102001125 |
Xin C et al 2021 Environmentally adaptive shape-morphing microrobots for localized cancer cell treatment ACS Nano 1518048–59 |
Zhang Q Y, He L L, Zhang X F, Tian D L and Jiang L 2020 Switchable direction of liquid transport via an anisotropic microarray surface and thermal stimuli ACS Nano 141436–44 |
Qu M N, Ma L L, Wang J X, Zhang Y, Zhao Y, Zhou Y C, Liu X R and He J M 2019 Multifunctional superwettable material with smart pH responsiveness for efficient and controllable oil/water separation and emulsified wastewater purification ACS Appl. Mater. Interfaces 1124668–82 |
Zhao Y H, Wu Y, Wang L, Zhang M M, Chen X, Liu M J, Fan J, Liu J Q, Zhou F and Wang Z K 2017 Bio-inspired reversible underwater adhesive Nat. Commun. 82218 |
Xiao Y-Y, Jiang Z-C, Tong X and Zhao Y 2019 Biomimetic locomotion of electrically powered “janus” soft robots using a liquid crystal polymer Adv. Mater. 311903452 |
Ze Q J, Kuang X, Wu S, Wong J, Montgomery S M, Zhang R D, Kovitz J M, Yang F Y, Qi H J and Zhao R K 2020 Magnetic shape memory polymers with integrated multifunctional shape manipulation Adv. Mater. 321906657 |
Xin C et al 2019 Conical hollow microhelices with superior swimming capabilities for targeted cargo delivery Adv. Mater. 311808226 |
Hines L, Petersen K, Lum G Z and Sitti M 2017 Soft actuators for small-scale robotics Adv. Mater. 291603483 |
Hippler M, Blasco E, Qu J Y, Tanaka M, Barner-Kowollik C, Wegener M and Bastmeyer M 2019 Controlling the shape of 3D microstructures by temperature and light Nat. Commun. 10232 |
Huang T-Y, Huang H-W, Jin D D, Chen Q Y, Huang J Y, Zhang L and Duan H L 2020 Four-dimensional micro-building blocks Sci. Adv. 6 eaav8219 |
Xia Y L, He Y, Zhang F H, Liu Y J and Leng J S 2021 A review of shape memory polymers and composites: mechanisms, materials, and applications Adv. Mater. 332000713 |
Bai X, Yang Q, Fang Y, Yong J L, Bai Y K, Zhang J W, Hou X and Chen F 2020 Anisotropic, adhesionswitchable, and thermal-responsive superhydrophobicity on the femtosecond laser-structured shape-memory polymer for droplet manipulation Chem. Eng. J. 400125930 |
Del Pozo M, Sol J A H P, Schenning A P H J and Debije M G 20224D printing of liquid crystals: what’s right for me? Adv. Mater. 342104390 |
White T J and Broer D J 2015 Programmable and adaptive mechanics with liquid crystal polymer networks and elastomers Nat. Mater. 141087–98 |
Ran C, Wang J C, He Y G, Ren Q, Hu H, Zhu J Q, Gu X X, Li M, Zheng L and Li J 2022 Recent advances in bioinspired hydrogels with environment-responsive characteristics for biomedical applications Macromol. Biosci. 222100474 |
Downs F G, Lunn D J, Booth M J, Sauer J B, Ramsay W J, Klemperer R G, Hawker C J and Bayley H 2020 Multi-responsive hydrogel structures from patterned droplet networks Nat. Chem. 12363–71 |
Apsite I, Salehi S and Ionov L 2022 Materials for smart soft actuator systems Chem. Rev. 1221349–415 |
Li J H and Pumera M 20213D printing of functional microrobots Chem. Soc. Rev. 502794–838 |
Wallin T J, Pikul J and Shepherd R F 20183D printing of soft robotic systems Nat. Rev. Mater. 384–100 |
Wu D, Leng Y-M, Fan C-J, Xu Z-Y, Li L, Shi L-Y, Yang K-K and Wang Y-Z 20224D printing of a fully biobased shape memory copolyester via a UV-assisted FDM strategy ACS Sustain. Chem. Eng. 106304–12 |
Kuang X, Roach D J, Wu J T, Hamel C M, Ding Z, Wang T J, Dunn M L and Qi H J 2019 Advances in 4D printing: materials and applications Adv. Funct. Mater. 291805290 |
Jiang P, Zhang Y X, Mu X X, Liu D S, Liu Y H, Guo R, Ji Z Y, Wang X Z and Wang X L 2022 Grayscale stereolithography of gradient hydrogel with site-selective shape deformation Adv. Mater. Technol. 72101288 |
Zhang Y H, Zhang F, Yan Z, Ma Q, Li X L, Huang Y G and Rogers J A 2017 Printing, folding and assembly methods for forming 3D mesostructures in advanced materials Nat. Rev. Mater. 217019 |
Namvar N, Zolfagharian A, Vakili-Tahami F and Bodaghi M 2022 Reversible energy absorption of elasto-plastic auxetic, hexagonal, and AuxHex structures fabricated by FDM 4D printing Smart Mater. Struct. 31055021 |
Huang H-W, Sakar M S, Petruska A J, Pané S and Nelson B J 2016 Soft micromachines with programmable motility and morphology Nat. Commun. 712263 |
Kachwal V and Tan J-C 2023 Stimuli-responsive electrospun fluorescent fibers augmented with aggregation-induced emission (AIE) for smart applications Adv. Sci. 102204848 |
Wang W, Li P-F, Xie R, Ju X-J, Liu Z and Chu L-Y 2022 Designable micro-/nano-structured smart polymeric materials Adv. Mater. 342107877 |
Jaiswal A, Rastogi C K, Rani S, Singh G P, Saxena S and Shukla S 2023 Two decades of two-photon lithography: materials science perspective for additive manufacturing of 2D/3D nano-microstructures iScience 26106374 |
Greant C, Van Durme B, Van Hoorick J and Van Vlierberghe S 2023 Multiphoton lithography as a promising tool for biomedical applications Adv. Funct. Mater. 2212641 |
Xu Y, Yu G, Nie R Q and Wu Z G 2022 Microfluidic systems toward blood hemostasis monitoring and thrombosis diagnosis: from design principles to micro/nano fabrication technologies View 320200183 |
Zhan Y, Cheng Q F, Song Y L and Li M Z 2022 Micro-nano structure functionalized perovskite optoelectronics: from structure functionalities to device applications Adv. Funct. Mater. 322200385 |
Huang Z Y, Shao G B and Li L Q 2023 Micro/nano functional devices fabricated by additive manufacturing Prog. Mater. Sci. 131101020 |
Sugioka K and Cheng Y 2014 Ultrafast lasers—reliable tools for advanced materials processing Light Sci. Appl. 3 e149 |
Sugioka K 2019 Hybrid femtosecond laser three-dimensional micro-and nanoprocessing: a review Int. J. Extrem. Manuf. 1012003 |
Liu H G, Lin W X and Hong M H 2021 Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications Light Sci. Appl. 10162 |
Chen Z J, Yang J, Liu H B, Zhao Y X and Pan R 2022 A short review on functionalized metallic surfaces by ultrafast laser micromachining Int. J. Adv. Manuf. Technol. 1196919–48 |
Wang J S, Fang F Z, An H J, Wu S, Qi H M, Cai Y X and Guo G Y 2023 Laser machining fundamentals: micro, nano, atomic and close-to-atomic scales Int. J. Extrem. Manuf. 5012005 |
Lin Z Y and Hong M H 2021 Femtosecond laser precision engineering: from micron, submicron, to nanoscale Ultrafast Sci. 20219783514 |
Wang A D, Sopeña P and Grojo D 2022 Burst mode enabled ultrafast laser inscription inside gallium arsenide Int. J. Extrem. Manuf. 4045001 |
Liu H, Zhang L, Huang J Y, Mao J J, Chen Z, Mao Q H, Ge M Z and Lai Y K 2022 Smart surfaces with reversibly switchable wettability: concepts, synthesis and applications Adv. Colloid Interface Sci. 300102584 |
Jiang S J et al 2019 Multifunctional Janus microplates arrays actuated by magnetic fields for water/light switches and bio-inspired assimilatory coloration Adv. Mater. 311807507 |
Jiang S J et al 2020 Three-dimensional multifunctional magnetically responsive liquid manipulator fabricated by femtosecond laser writing and soft transfer Nano Lett. 207519–29 |
Ma Z-C, Hu X-Y, Zhang Y-L, Liu X-Q, Hou Z-S, Niu L-G, Zhu L, Han B, Chen Q-D and Sun H-B 2019 Smart compound eyes enable tunable imaging Adv. Funct. Mater. 291903340 |
Hou Z S, Sun S M, Zheng B Y, Yang R Z and Li A W 2015 Stimuli-responsive protein-based micro/nano-waveguides RSC Adv. 577847–50 |
He Z Q, Lee Y-H, Chanda D and Wu S-T 2018 Adaptive liquid crystal microlens array enabled by two-photon polymerization Opt. Express 2621184–93 |
Jin D D, Chen Q Y, Huang T-Y, Huang J Y, Zhang L and Duan H L 2020 Four-dimensional direct laser writing of reconfigurable compound micromachines Mater. Today 3219–25 |
Zhang J et al 2022 Ultrafast laser-ablated bioinspired hydrogel-based porous gating system for sustained drug release ACS Appl. Mater. Interfaces 1435366–75 |
Pennacchio F A, Fedele C, De Martino S, Cavalli S, Vecchione R and Netti P A 2018 Three-dimensional microstructured azobenzene-containing gelatin as a photoactuable cell confining system ACS Appl. Mater. Interfaces 1091–97 |
Eaton S M, Cerullo G and Osellame R 2012 Fundamentals of femtosecond laser modification of bulk dielectrics Femtosecond Laser Micromachining ed R Osellame, G Cerullo and R Ramponi (Springer) pp 3–18 |
Schaffer C B, Brodeur A and Mazur E 2001 Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses Meas. Sci. Technol. 121784–94 |
Stoian R, Rosenfeld A, Ashkenasi D, Hertel I V, Bulgakova N M and Campbell E E B 2002 Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation Phys. Rev. Lett. 88097603 |
Nedialkov N N, Imamova S E and Atanasov P A 2004 Ablation of metals by ultrashort laser pulses J. Phys. D: Appl. Phys. 37638–43 |
Ashitkov S I, Komarov P S, Ovchinnikov A V, Struleva E V, Zhakhovskii V V, Inogamov N A and Agranat M B 2014 Ablation and nanostructuring of metals by femtosecond laser pulses Quantum Electron. 44535–9 |
Anisimov S I and Luk’yanchuk B S 2002 Selected problems of laser ablation theory Phys.-Usp. 45293–324 |
Yang J, Zhao Y and Zhu X 2007 Theoretical studies of ultrafast ablation of metal targets dominated by phase explosion Appl. Phys. A 89571–8 |
Bulgakova N M and Bourakov I M 2002 Phase explosion under ultrashort pulsed laser ablation: modeling with analysis of metastable state of melt Appl. Surf. Sci. 197–19841–44 |
Bouilly D, Perez D and Lewis L J 2007 Damage in materials following ablation by ultrashort laser pulses: a molecular-dynamics study Phys. Rev. B 76184119 |
Perez D and Lewis L J 2002 Ablation of solids under femtosecond laser pulses Phys. Rev. Lett. 89255504 |
von der Linde D, Sokolowski-Tinten K and Bialkowski J 1997 Laser–solid interaction in the femtosecond time regime Appl. Surf. Sci. 109–1101–10 |
Rethfeld B, Sokolowski-Tinten K, von der Linde D and Anisimov S I 2004 Timescales in the response of materials to femtosecond laser excitation Appl. Phys. A 79767–9 |
Hohlfeld J, Wellershoff S-S, Güdde J, Conrad U, Jähnke V and Matthias E 2000 Electron and lattice dynamics following optical excitation of metals Chem. Phys. 251237–58 |
Liu X, Du D and Mourou G 1997 Laser ablation and micromachining with ultrashort laser pulses IEEE J. Quantum Electron. 331706–16 |
Mannion P T, Magee J, Coyne E, O’Connor G M and Glynn T J 2004 The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air Appl. Surf. Sci. 233275–87 |
Anisimov S I, Kapeliovich B L and Perel’man T L 1974 Electron emission from metal surfaces exposed to ultrashort laser pulses Sov. Phys - JETP 39375–7 |
Jiang L and Tsai H-L 2005 Improved two-temperature model and its application in ultrashort laser heating of metal films J. Heat Transfer 1271167–73 |
Darkins R and Duffy D M 2018 Modelling radiation effects in solids with two-temperature molecular dynamics Comput. Mater. Sci. 147145–53 |
Povarnitsyn M E, Fokin V B and Levashov P R 2015 Microscopic and macroscopic modeling of femtosecond laser ablation of metals Appl. Surf. Sci. 3571150–6 |
Li X and Jiang L 2012 Size distribution control of metal nanoparticles using femtosecond laser pulse train: a molecular dynamics simulation Appl. Phys. A 109367–76 |
Ahmmed K M T, Grambow C and Kietzig A-M 2014 Fabrication of micro/nano structures on metals by femtosecond laser micromachining Micromachines 51219–53 |
Sundaram S K and Mazur E 2002 Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses Nat. Mater. 1217–24 |
Balling P and Schou J 2013 Femtosecond-laser ablation dynamics of dielectrics: basics and applications for thin films Rep. Prog. Phys. 76036502 |
Mihailov S J, Grobnic D, Hnatovsky C, Walker R B, Lu P, Coulas D and Ding H M 2017 Extreme environment sensing using femtosecond laser-inscribed fiber Bragg gratings Sensors 172909 |
Wu M T, Guo B, Zhao Q L, He P, Zeng Z Q and Zang J 2018 The influence of the ionization regime on femtosecond laser beam machining mono-crystalline diamond Opt. Laser Technol. 10634–39 |
Henyk M, Mitzner R, Wolfframm D and Reif J 2000 Laser-induced ion emission from dielectrics Appl. Surf. Sci. 154–155249–55 |
Maruo S, Nakamura O and Kawata S 1997 Three-dimensional microfabrication with two-photon-absorbed photopolymerization Opt. Lett. 22132–4 |
Skliutas E, Lebedevaite M, Kabouraki E, Baldacchini T, Ostrauskaite J, Vamvakaki M, Farsari M, Juodkazis S and Malinauskas M 2021 Polymerization mechanisms initiated by spatio-temporally confined light Nanophotonics 101211–42 |
Gonzalez-Hernandez D, Varapnickas S, Bertoncini A, Liberale C and Malinauskas M 2023 Micro-optics 3D printed via multi-photon laser lithography Adv. Opt. Mater. 112201701 |
Cumpston B H et al 1999 Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication Nature 39851–54 |
Bin F-C, Guo M, Li T, Zheng Y-C, Dong X-Z, Liu J, Jin F and Zheng M-L 2023 Carbazole-based anion ionic water-soluble two-photon initiator for achieving 3D hydrogel structures Adv. Funct. Mater. 2300293 |
Harinarayana V and Shin Y C 2021 Two-photon lithography for three-dimensional fabrication in micro/nanoscale regime: a comprehensive review Opt. Laser Technol. 142107180 |
Liaros N and Fourkas J T 2017 The characterization of absorptive nonlinearities Laser Photonics Rev. 111700106 |
Fischer J, Mueller J B, Kaschke J, Wolf T J A, Unterreiner A N and Wegener M 2013 Three-dimensional multi-photon direct laser writing with variable repetition rate Opt. Express 2126244–60 |
Liu K L, Ding H B, Li S, Niu Y F, Zeng Y, Zhang J N, Du X and Gu Z Z 20223D printing colloidal crystal microstructures via sacrificial-scaffold-mediated two-photon lithography Nat. Commun. 134563 |
Wang X D, Yu H B, Li P W, Zhang Y Z, Wen Y D, Qiu Y, Liu Z, Li Y P and Liu L Q 2021 Femtosecond laser-based processing methods and their applications in optical device manufacturing: a review Opt. Laser Technol. 135106687 |
Xing J-F, Dong X-Z, Chen W-Q, Duan X-M, Takeyasu N, Tanaka T and Kawata S 2007 Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency Appl. Phys. Lett. 90131106 |
Ligon S C, Husár B, Wutzel H, Holman R and Liska R 2014 Strategies to reduce oxygen inhibition in photoinduced polymerization Chem. Rev. 114557–89 |
Yang L, Münchinger A, Kadic M, Hahn V, Mayer F, Blasco E, Barner-Kowollik C and Wegener M 2019 On the Schwarzschild effect in 3D two-photon laser lithography Adv. Opt. Mater. 71901040 |
Bauer J, Guell Izard A, Zhang Y F, Baldacchini T and Valdevit L 2019 Programmable mechanical properties of two-photon polymerized materials: from nanowires to bulk Adv. Mater. Technol. 41900146 |
Henning I, Woodward A W, Rance G A, Paul B T, Wildman R D, Irvine D J and Moore J C 2020 A click chemistry strategy for the synthesis of efficient photoinitiators for two-photon polymerization Adv. Funct. Mater. 302006108 |
Xia H, Wang J, Tian Y, Chen Q-D, Du X-B, Zhang Y-L, He Y and Sun H-B 2010 Ferrofluids for fabrication of remotely controllable micro-nanomachines by two-photon polymerization Adv. Mater. 223204–7 |
Xin C et al 2022 Rapid and multimaterial 4D printing of shape-morphing micromachines for narrow micronetworks traversing Small 182202272 |
Ennis A, Nicdao D, Kolagatla S, Dowling L, Tskhe Y, Thompson A J, Trimble D, Delaney C and Florea L 2023 Two-photon polymerization of sugar responsive 4D microstructures Adv. Funct. Mater. 2213947 |
Sugioka K and Cheng Y 2014 Femtosecond laser three-dimensional micro- and nanofabrication Appl. Phys. Rev. 1041303 |
Kawata S, Sun H-B, Tanaka T and Takada K 2001 Finer features for functional microdevices Nature 412697–8 |
Calin B S and Paun I A 2022 A review on stimuli-actuated 3D micro/nanostructures for tissue engineering and the potential of laser-direct writing via two-photon polymerization for structure fabrication Int. J. Mol. Sci. 2314270 |
Jia Y X et al 2022 Covalent adaptable microstructures via combining two-photon laser printing and alkoxyamine chemistry: toward living 3D microstructures Adv. Funct. Mater. 2207826 |
Gauci S C, Gernhardt M, Frisch H, Houck H A, Blinco J P, Blasco E, Tuten B T and Barner-Kowollik C 20223D printed microstructures erasable by darkness Adv. Funct. Mater. 2206303 |
Ocier C R et al 2020 Direct laser writing of volumetric gradient index lenses and waveguides Light Sci. Appl. 9196 |
Aderneuer T, Fernández O and Ferrini R 2021 Two-photon grayscale lithography for free-form micro-optical arrays Opt. Express 2939511–20 |
Porte X, Dinc N U, Moughames J, Panusa G, Juliano C, Kadic M, Moser C, Brunner D and Psaltis D 2021 Direct (3+1)D laser writing of graded-index optical elements Optica 81281–7 |
Sun Y-L, Dong W-F, Niu L-G, Jiang T, Liu D-X, Zhang L, Wang Y-S, Chen Q-D, Kim D-P and Sun H-B 2014 Protein-based soft micro-optics fabricated by femtosecond laser direct writing Light Sci. Appl. 3 e129 |
Serbin J, Egbert A, Ostendorf A, Chichkov B, Houbertz R, Domann G, Schulz J, Cronauer C, Fröhlich L and Popall M 2003 Femtosecond laser-induced two-photon polymerization of inorganic–organic hybrid materials for applications in photonics Opt. Lett. 28301–3 |
Seet K K, Mizeikis V, Matsuo S, Juodkazis S and Misawa H 2005 Three-dimensional spiral-architecture photonic crystals obtained by direct laser writing Adv. Mater. 17541–5 |
Tian Z-N, Yao W-G, Xu J-J, Yu Y-H, Chen Q-D and Sun H-B 2015 Focal varying microlens array Opt. Lett. 404222–5 |
Dadras-Toussi O, Khorrami M, Louis Sam Titus A S C, Majd S, Mohan C and Abidian M R 2022 Multiphoton lithography of organic semiconductor devices for 3D printing of flexible electronic circuits, biosensors, and bioelectronics Adv. Mater. 342200512 |
Zhang Y-L, Chen Q-D, Xia H and Sun H-B 2010 Designable 3D nanofabrication by femtosecond laser direct writing Nano Today 5435–48 |
Wei S X, Liu J, Zhao Y Y, Zhang T B, Zheng M L, Jin F, Dong X Z, Xing J F and Duan X M 2017 Protein-based 3D microstructures with controllable morphology and pH-responsive properties ACS Appl. Mater. Interfaces 942247–57 |
Li Q, Kulikowski J, Doan D, Tertuliano O A, Zeman C J, Wang M M, Schatz G C and Gu X W 2022 Mechanical nanolattices printed using nanocluster-based photoresists Science 378768–73 |
Huang Z J, Tsui G C P, Deng Y and Tang C-Y 2020 Two-photon polymerization nanolithography technology for fabrication of stimulus-responsive micro/nano-structures for biomedical applications Nanotechnol. Rev. 91118–36 |
Lao Z X, Xia N, Wang S J, Xu T T, Wu X Y and Zhang L 2021 Tethered and untethered 3D microactuators fabricated by two-photon polymerization: a review Micromachines 12465 |
Ren L Q, Nama N, Mcneill J M, Soto F, Yan Z F, Liu W, Wang W, Wang J and Mallouk T E 20193D steerable, acoustically powered microswimmers for single-particle manipulation Sci. Adv. 5 eaax3084 |
Jeon S et al 2019 Magnetically actuated microrobots as a platform for stem cell transplantation Sci. Robot. 4 eaav4317 |
Li G et al 2016 Multifunctional ultrathin aluminum foil: oil/water separation and particle filtration J. Mater. Chem. A 418832–40 |
Albu C, Dinescu A, Filipescu M, Ulmeanu M and Zamfirescu M 2013 Periodical structures induced by femtosecond laser on metals in air and liquid environments Appl. Surf. Sci. 278347–51 |
Zhang Z et al 2017 A Janus oil barrel with tapered microhole arrays for spontaneous high-flux spilled oil absorption and storage Nanoscale 915796–803 |
Wu D et al 2020 High-performance unidirectional manipulation of microdroplets by horizontal vibration on femtosecond laser-induced slant microwall arrays Adv. Mater. 322005039 |
Jia T Q, Chen H X, Huang M, Zhao F L, Qiu J R, Li R X, Xu Z Z, He X K, Zhang J and Kuroda H 2005 Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses Phys. Rev. B 72125429 |
van Driel H M, Sipe J E and Young J F 1982 Laser-induced periodic surface structure on solids: a universal phenomenon Phys. Rev. Lett. 491955–8 |
Birnbaum M 1965 Semiconductor surface damage produced by ruby lasers J. Appl. Phys. 363688–9 |
Wang Y, Wang Y and Zhdanov A 2019 Review of femtosecond laser induced surface periodic structure Proc. SPIE 11193111930V |
Zhang D S, Liu R J and Li Z G 2022 Irregular LIPSS produced on metals by single linearly polarized femtosecond laser Int. J. Extrem. Manuf. 4015102 |
Volkov S N, Kaplan A E and Miyazaki K 2009 Evanescent field at nanocorrugated dielectric surface Appl. Phys. Lett. 94041104 |
Rudenko A, Mauclair C, Garrelie F, Stoian R and Colombier J-P 2019 Self-organization of surfaces on the nanoscale by topography-mediated selection of quasi-cylindrical and plasmonic waves Nanophotonics 8459–65 |
Sipe J E, Young J F, Preston J S and van Driel H M 1983 Laser-induced periodic surface structure. I. Theory Phys. Rev. B 271141–54 |
Bonse J, Rosenfeld A and Krüger J 2009 On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses J. Appl. Phys. 106104910 |
Nathala C S R, Ajami A, Ionin A A, Kudryashov S I, Makarov S V, Ganz T, Assion A and Husinsky W 2015 Experimental study of fs-laser induced sub-100-nm periodic surface structures on titanium Opt. Express 235915–29 |
Wu M T, Guo B, Zhao Q L, Fan R W, Dong Z W and Yu X 2018 The influence of the focus position on laser machining and laser micro-structuring monocrystalline diamond surface Opt. Laser. Eng. 10560–67 |
Qi L T, Nishii K and Namba Y 2009 Regular subwavelength surface structures induced by femtosecond laser pulses on stainless steel Opt. Lett. 341846–8 |
Liu Y, Li S Y, Niu S C, Cao X W, Han Z W and Ren L Q 2016 Bio-inspired micro-nano structured surface with structural color and anisotropic wettability on Cu substrate Appl. Surf. Sci. 379230–7 |
Bonse J, Koter R, Hartelt M, Spaltmann D, Pentzien S, Höhm S, Rosenfeld A and Krüger J 2015 Tribological performance of femtosecond laser-induced periodic surface structures on titanium and a high toughness bearing steel Appl. Surf. Sci. 33621–27 |
Long J Y, Fan P X, Zhong M L, Zhang H J, Xie Y D and Lin C 2014 Superhydrophobic and colorful copper surfaces fabricated by picosecond laser induced periodic nanostructures Appl. Surf. Sci. 311461–7 |
Jiang H-B, Zhang Y-L, Liu Y, Fu X-Y, Li Y-F, Liu Y-Q, Li C-H and Sun H-B 2016 Bioinspired few-layer graphene prepared by chemical vapor deposition on femtosecond laser-structured Cu foil Laser Photonics Rev. 10441–50 |
Li C Z et al 2021 Noncontact all-in-situ reversible reconfiguration of femtosecond laser-induced shape memory magnetic microcones for multifunctional liquid droplet manipulation and information encryption Adv. Funct. Mater. 312100543 |
Wu J R, He J, Yin K, Zhu Z, Xiao S, Wu Z P and Duan J-A 2021 Robust hierarchical porous PTFE film fabricated via femtosecond laser for self-cleaning passive cooling Nano Lett. 214209–16 |
Guo Y, Qiu P, Xu S L and Cheng G J 2022 Laser-induced microjet-assisted ablation for high-quality microfabrication Int. J. Extrem. Manuf. 4035101 |
Sohn I-B, Choi H-K, Noh Y-C, Kim J and Ahsan S 2019 Laser assisted fabrication of micro-lens array and characterization of their beam shaping property Appl. Surf. Sci. 479375–85 |
Shimotsuma Y, Hirao K, Kazansky P G and Qiu J R 2005 Three-dimensional micro-and nano-fabrication in transparent materials by femtosecond laser Jpn. J. Appl. Phys. 444735–48 |
Liao C R, Li Y H, Wang D N, Sun T and Grattan K T V 2010 Morphology and thermal stability of fiber Bragg gratings for sensor applications written in H2-free and H2-loaded fibers by femtosecond laser IEEE Sens. J. 101675–81 |
Chen F and de Aldana J R V 2014 Optical waveguides in crystalline dielectric materials produced by femtosecond-laser micromachining Laser Photonics Rev. 8251–75 |
Zhang C, Dong N N, Yang J, Chen F, de Aldana J R V and Lu Q M 2011 Channel waveguide lasers in Nd:GGG crystals fabricated by femtosecond laser inscription Opt. Express 1912503–8 |
Jia Y C, Dong N N, Chen F, de Aldana J R V, Akhmadaliev S and Zhou S Q 2012 Continuous wave ridge waveguide lasers in femtosecond laser micromachined ion irradiated Nd: YAG single crystals Opt. Mater. Express 2657–62 |
Ams M, Dekker P, Marshall G D and Withford M J 2012 Ultrafast laser-written dual-wavelength waveguide laser Opt. Lett. 37993–5 |
Della Valle G, Taccheo S, Osellame R, Festa A, Cerullo G and Laporta P 20071.5µm single longitudinal mode waveguide laser fabricated by femtosecond laser writing Opt. Express 153190–4 |
Wang M H, Zhao K H, Wu J Y, Li Y Q, Yang Y, Huang S, Zhao J R, Tweedle T, Carpenter D and Zheng G Q 2021 Femtosecond laser fabrication of nanograting-based distributed fiber sensors for extreme environmental applications Int. J. Extrem. Manuf. 3025401 |
Watanabe W, Asano T, Yamada K, Itoh K and Nishii J 2003 Wavelength division with three-dimensional couplers fabricated by filamentation of femtosecond laser pulses Opt. Lett. 282491–3 |
Butkutė A and Jonuˇsauskas L 20213D manufacturing of glass microstructures using femtosecond laser Micromachines 12499 |
Itoh K, Watanabe W, Nolte S and Schaffer C B 2006 Ultrafast processes for bulk modification of transparent materials MRS Bull. 31620–5 |
Sakakura M, Lei Y H, Wang L, Yu Y-H and Kazansky P G 2020 Ultralow-loss geometric phase and polarization shaping by ultrafast laser writing in silica glass Light Sci. Appl. 915 |
Sun Y-K, Zhang X-L, Yu F, Tian Z-N, Chen Q-D and Sun H-B 2022 Non-Abelian Thouless pumping in photonic waveguides Nat. Phys. 181080–5 |
Wolf A, Dostovalov A, Bronnikov K and Babin S 2019 Arrays of fiber Bragg gratings selectively inscribed in different cores of 7-core spun optical fiber by IR femtosecond laser pulses Opt. Express 2713978–90 |
Zhang X-L, Yu F, Chen Z-G, Tian Z-N, Chen Q-D, Sun H-B and Ma G C 2022 Non-Abelian braiding on photonic chips Nat. Photon. 16390–5 |
Wei D Z et al 2018 Experimental demonstration of a three-dimensional lithium niobate nonlinear photonic crystal Nat. Photon. 12596–600 |
Li Y, Liu H G and Hong M H 2020 High-quality sapphire microprocessing by dual-beam laser induced plasma assisted ablation Opt. Express 286242–50 |
Shao K X, Jiang S J, Hu Y L, Zhang Y Y, Li C Z, Zhang Y X, Li J W, Wu D and Chu J R 2022 Bioinspired lubricated slippery magnetic responsive microplate array for high performance multi-substance transport Adv. Funct. Mater. 322205831 |
Deng C, Kim H and Ki H 2019 Fabrication of a compound infrared microlens array with ultrashort focal length using femtosecond laser-assisted wet etching and dual-beam pulsed laser deposition Opt. Express 2728679–91 |
Liu X-Q, Bai B-F, Chen Q-D and Sun H-B 2019 Etching-assisted femtosecond laser modification of hard materials Opto Electron. Adv. 2190021 |
Juodkazis S, Nishimura K, Misawa H, Ebisui T, Waki R, Matsuo S and Okada T 2006 Control over the crystalline state of sapphire Adv. Mater. 181361–4 |
Liu X-Q, Yang S-N, Yu L, Chen Q-D, Zhang Y-L and Sun H-B 2019 Rapid engraving of artificial compound eyes from curved sapphire substrate Adv. Funct. Mater. 291900037 |
Ródenas A, Gu M, Corrielli G, Paiè P, John S, Kar A K and Osellame R 2019 Three-dimensional femtosecond laser nanolithography of crystals Nat. Photon. 13105–9 |
Liu H G, Li Y, Lin W X and Hong M H 2020 High-aspect-ratio crack-free microstructures fabrication on sapphire by femtosecond laser ablation Opt. Laser Technol. 132106472 |
Li M J, Yang T Z, Yang Q, Fang Z, Bian H, Zhang C J, Hou X and Chen F 2022 Bioinspired anti-fogging and anti-fouling artificial compound eyes Adv. Opt. Mater. 102200861 |
Li C Z et al 2022 Laser-induced morphology-switchable slanted shape memory microcones for maneuvering liquid droplets and dry adhesion Appl. Phys. Lett. 120061603 |
Zhang Y X et al 2022 Reconfigurable magnetic liquid metal robot for high-performance droplet manipulation Nano Lett. 222923–33 |
Liu Z M, Li M, Dong X G, Ren Z Y, Hu W Q and Sitti M 2022 Creating three-dimensional magnetic functional microdevices via molding-integrated direct laser writing Nat. Commun. 132016 |
Tiryaki M E and Sitti M 2022 Magnetic resonance imaging-based tracking and navigation of submillimeter-scale wireless magnetic robots Adv. Intell. Syst. 42100178 |
Li R et al 2022 Magnetically encoded 3D mesostructure with high-order shape morphing and high-frequency actuation Natl Sci. Rev. 9 nwac163 |
Song X, Sun R J, Wang R, Zhou K, Xie R X, Lin J L, Georgiev D, Paraschiv A-A, Zhao R B and Stevens M M 2022 Puffball-inspired microrobotic systems with robust payload, strong protection, and targeted locomotion for on-demand drug delivery Adv. Mater. 342204791 |
Tang Y C, Li M T, Wang T L, Dong X G, Hu W Q and Sitti M 2022 Wireless miniature magnetic phase-change soft actuators Adv. Mater. 342204185 |
Kim S, Lee S, Lee J, Nelson B J, Zhang L and Choi H 2016 Fabrication and manipulation of ciliary microrobots with non-reciprocal magnetic actuation Sci. Rep. 630713 |
Yasa I C, Tabak A F, Yasa O, Ceylan H and Sitti M 20193D-printed microrobotic transporters with recapitulated stem cell niche for programmable and active cell delivery Adv. Funct. Mater. 291808992 |