Zhang D S, Ranjan B, Tanaka T, Sugioka K. 2020. Underwater persistent bubble-assisted femtosecond laser ablation for hierarchical micro/nanostructuring. Int. J. Extrem. Manuf. 2, 015001.
Citation:
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Zhang D S, Ranjan B, Tanaka T, Sugioka K. 2020. Underwater persistent bubble-assisted femtosecond laser ablation for hierarchical micro/nanostructuring. Int. J. Extrem. Manuf. 2, 015001.
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Underwater persistent bubble-assisted femtosecond laser ablation for hierarchical micro/nanostructuring
More Information
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1 RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan;
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2 Innovative Photon Manipulation Research Team, RIKEN Center for Advanced Photonics, Wako, Saitama
351-0198, Japan;
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3 Metamaterials Laboratory, RIKEN Cluster for Pioneering Research, Wako, Saitama 351-0198, Japan
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Abstract
Laser offers ability of performing surface processing and synthesis of nanomaterials at the same time, so called “two birds with one stone”, which is beneficial for a large variety of practical applications. Prof. Sugioka’s team aims at research and development of extreme manufacturing techniques based on lasers which can realize low environmental load, high quality, high efficiency fabrication of materials using ultrafast lasers such as femtosecond and picosecond lasers. The developed techniques include three-dimensional (3D) micro/nanofabrication, hierarchical micro/nanostructuring, high aspect ratio machining, and synthesis of new materials. In this paper, a new processing technique termed underwater persistent bubble assisted femtosecond laser ablation in liquids (UPB-fs-LAL) is presented, which can produce concentric circular macrostructures with millimeter-scale tails on silicon substrates. Long-tailed macrostructures are composed of layered fan-shaped (central angles of 45°–141°) hierarchical micro/nanostructures, which are produced by fan-shaped beams refracted at the mobile bubble interface (≥50° light tilt, referred to as the vertical incident direction) during UPB-fs-LAL with a line-by-line scanning scheme. Centric circular macrostructures contain low/high/ultrahigh spatial frequency laser-induced periodic surface structures (LSFLs/HSFLs/UHSFLs) with periods of 550–900, 100–200, 40–100 nm, which are produced by fs-LAL with the aid of stationary bubbles in water. A period of 40 nm, less than 1/25th of the laser wavelength (1030 nm), is the finest laser-induced periodic surface structures (LIPSS) among ever created on silicon. This research opens up new possibilities for laser materials processing, since it enables template-free cost-effective laser structuring of arrays of hierarchical micro/nanostructures. Such bubble-based laser processing may further increase versatility of the laser processing.
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Keywords
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Author Introduction
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Prof. Koji Sugioka received his B. S., Ms. Eng., and Dr. Eng. Degrees in electronics from Waseda University (Japan) in 1984, 1986, 1993, respectively. He Joined RIKEN in 1986 and is currently a Team Leader of Advanced Laser Processing Research Team at RIKEN Center for Advanced Photonics. He is concurrently a guest professor at Tokyo Denki University since 2004 and was a guest professor at Tokyo University of Science from 2006 to 2014, at Kyoto University from 2016 to 2017 and at Osaka University from 2018 to 2019. He was awarded the degree of Doctor Honoris Causa from University of Szeged, Hungary in 2018. He is currently a member of the board of directors of the Laser Institute of America (LIA), Japanese Laser Processing Society (JLPS), and the Japan Society of Laser Technology (JLST), a council member of the Intl. Academy of Photonics and Laser Engineering (IAPLE), and a Fellow of SPIE, OSA, LIA, and IAPLE. He is also an editor-in-chief of Journal of the Laser Micro/Nanoengineering (JLMN) and an editor of Opto-Electronic Advances (OEA), Advanced Optical Technology (AOT), Nanomaterials, and International Journal of Extreme Manufacturing (IJEM).
Dr. Dongshi Zhang obtained his PhD degree from Xi’an Jiaotong University in 2014, soon after he joined Prof. Stephan Barcikowski group, Technical chemistry I, Duisburg-Essen university, Germany to do a postdoctoral research. Then, he did several months of visiting research in Prof. Changhao Liang in Institute of Solid State Physics, Chinese Academy of Sciences. In 2017, he joined Prof. Koji Sugioka group to pursue his postdoctoral study on preparation, manipulation and application of nanomaterials and nanostructures developed by laser ablation. Recent years, he published many papers in Chemical reviews (highly cited paper), ACS Applied Nano Materials, Nanomaterials and so on. His total citations are more than one thousand and his H-index is 21.
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